JPH01135067A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPH01135067A
JPH01135067A JP62293309A JP29330987A JPH01135067A JP H01135067 A JPH01135067 A JP H01135067A JP 62293309 A JP62293309 A JP 62293309A JP 29330987 A JP29330987 A JP 29330987A JP H01135067 A JPH01135067 A JP H01135067A
Authority
JP
Japan
Prior art keywords
film
semiconductor layer
type
conductivity type
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62293309A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548937B2 (en]
Inventor
Tadashi Daimon
大門　直史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62293309A priority Critical patent/JPH01135067A/ja
Publication of JPH01135067A publication Critical patent/JPH01135067A/ja
Publication of JPH0548937B2 publication Critical patent/JPH0548937B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP62293309A 1987-11-20 1987-11-20 半導体装置の製造方法 Granted JPH01135067A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62293309A JPH01135067A (ja) 1987-11-20 1987-11-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62293309A JPH01135067A (ja) 1987-11-20 1987-11-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH01135067A true JPH01135067A (ja) 1989-05-26
JPH0548937B2 JPH0548937B2 (en]) 1993-07-22

Family

ID=17793167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62293309A Granted JPH01135067A (ja) 1987-11-20 1987-11-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH01135067A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648659U (ja) * 1992-10-13 1994-07-05 泰江 吉本 鼻孔の霧状噴射洗浄器

Also Published As

Publication number Publication date
JPH0548937B2 (en]) 1993-07-22

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